The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Jul. 09, 2007
Satoshi Akimoto, Utsunomiya, JP;
Satoshi Akimoto, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In an exposure apparatus having a plurality of substrate stages moving between a plurality of stations, errors due to the combination of the stage and a position measuring unit, such as Abbe error and errors due to the surface configuration of a reflection mirror, are precisely corrected to reduce the position error of the substrate stage. The exposure apparatus includes a control device having a storage unit and a correction unit. The storage unit stores the correction information established every combination of the plurality of substrate stages and a plurality of position measuring units, and the correction unit corrects the result measured by the plurality of position measuring units on the basis of the correction information corresponding to the combination of the substrate stages and the position measuring units among pieces of correction information stored in the storage unit.