The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Mar. 03, 2005
Frank Fischer, Gomaringen, DE;
Hans Artmann, Böblingen-Dagersheim, DE;
Lars Metzger, Moessingen-Belsen, DE;
Arnim Hoechst, Tuebingen, DE;
Julian Gonska, Reutlingen, DE;
Frank Fischer, Gomaringen, DE;
Hans Artmann, Böblingen-Dagersheim, DE;
Lars Metzger, Moessingen-Belsen, DE;
Arnim Hoechst, Tuebingen, DE;
Julian Gonska, Reutlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical component having a diaphragm is provided, the structure of which effectively prevents the penetration of dirt particles into the cavity. A method for manufacturing such a component is also provided. The structure of the component is implemented in a layer structure which includes at least one first sacrificial layer and a layer system over the first sacrificial layer. A cavity is formed in the first sacrificial layer underneath the diaphragm. In the region of the diaphragm between the upper layer and the lower layer of the layer system situated directly above the first sacrificial layer, at least one access channel to the cavity is formed which has at least one opening in the upper layer and at least one opening in the lower layer, the opening in the upper layer and the opening in the lower layer being offset with respect to each other.