The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Feb. 03, 2005
Katsumi Ito, Tokyo, JP;
Kazuya Maekawa, Tokyo, JP;
Etsuo Takeuchi, Tokyo, JP;
Nobuo Yajima, Tokyo, JP;
Junichi Sato, Tokyo, JP;
Katsumi Ito, Tokyo, JP;
Kazuya Maekawa, Tokyo, JP;
Etsuo Takeuchi, Tokyo, JP;
Nobuo Yajima, Tokyo, JP;
Junichi Sato, Tokyo, JP;
TDK Corporation, Tokyo, JP;
Abstract
The frequency of replacement of an insulating spacer disposed between grids of an ion beam irradiation apparatus is to be reduced. In addition, the intervals of the multiple grids in the ion beam irradiation apparatus are to be kept constant. To achieve these objects, in a so-called insulating spacer provided for maintaining insulation between the grids, a groove portion having a bottom onto which sputtered materials are hard to adhere is provided on the central portion of the side surface of the insulating spacer all along its circumference.