The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Mar. 13, 2007
Applicants:
Alexei Victorovich Ermakov, Piscataway, NJ (US);
Barbara Jane Hinch, Piscataway, NJ (US);
Inventors:
Alexei Victorovich Ermakov, Piscataway, NJ (US);
Barbara Jane Hinch, Piscataway, NJ (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); G01N 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The inventive apparatus measures workfunction values using deflection of an electron beam without direct contact of the electron beam with the sample surface. The apparatus, mounted within a vacuum chamber, includes an electron gun, a position sensitive electron detector, and a sample. The sample is located such that an electron beam emanating from the gun can approach the surface and then be deflected into the position sensitive electron detector. Workfunction values are then derived from a measured deflected-electron position distribution.