The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
May. 26, 2006
Jessy Bustos, Le Touvet, FR;
Philippe Thony, Saint Joseph de Riviére, FR;
Philippe Coronel, Barraux, FR;
Jessy Bustos, Le Touvet, FR;
Philippe Thony, Saint Joseph de Riviére, FR;
Philippe Coronel, Barraux, FR;
STMicroelectronics (Crolles 2) SAS, Crolles, FR;
Commissariat a l'Energie Atomique, Paris, FR;
Abstract
An integrated electronic circuit includes a cavity buried in a substrate. A surface of the substrate has a depression aligned above the buried cavity. The depression is filled with a material selected so that reflection of a lithography radiation on the substrate surface is attenuated. A resist layer is deposited on the circuit and then exposed to the radiation so that those resist portions which are located above the depression and those located away from the depression receive amounts of radiation that are below and above, respectively, the development threshold of the resist. An etching mask is therefore obtained on the circuit, which is aligned with respect to the cavity and its associated surface depression.