The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2009
Filed:
Jul. 19, 2006
Kazuhiro Gomi, Chino, JP;
Kazuhiro Gomi, Chino, JP;
Seiko Epson Corporation, , JP;
Abstract
A reduced-pressure drying apparatus for drying a solvent in a liquid under a reduced pressure by evaporation of the solvent, includes a chamber including a first chamber and a second chamber, the first chamber accommodating work to which a liquid containing a film forming material is applied, the second chamber being coupled to the first chamber through a communicating part; a depressurizing unit depressurizing at least the second chamber; a communicating valve opening and closing the communicating part; and a control unit controlling a reduced pressure state at least of the second chamber by driving the depressurizing unit, the control unit also controlling an opening and closing state of the communicating part by driving the communicating valve.