The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2009
Filed:
Jun. 02, 2005
Fan-tien Cheng, Tainan, TW;
Yu-chuan Su, Hsin Ying, TW;
Guo-wei Huang, San Chung, TW;
Min-hsiung Hung, Ta Hsi Town, TW;
Fan-Tien Cheng, Tainan, TW;
Yu-Chuan Su, Hsin Ying, TW;
Guo-Wei Huang, San Chung, TW;
Min-Hsiung Hung, Ta Hsi Town, TW;
National Cheng Kung University, Tainan, TW;
Abstract
A quality prognostics system and a quality prognostics method for predicting the product quality during manufacturing processes are disclosed, wherein the current production tool parameters sensed during the manufacturing process and several previous quality data collected from the measurement tool are utilized to predict the future product quality, and a conjecture modeling step and prediction modeling step are performed respectively. The conjecture modeling step itself also can be applied for the purpose of virtual metrology. Further, a self-searching step and a self-adjusting step are performed for searching the best combination of various parameters/functions used by the conjecture algorithm or prediction algorithm; and meeting the requirements of new equipment parameters and conjecture/prediction accuracy.