The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7492510 B1

PDF
Full Text
Expired
Date of Patent:
Feb. 17, 2009

Filed:

Nov. 08, 2006
Applicant:

Seiji Kuwabara, Utsunomiya, JP;

Inventor:

Seiji Kuwabara, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 5/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

An optical element includes a substrate that transmits a light having a central wavelength in a wave range between 150 nm and 250 nm, and an n-layer antireflection film that is formed on the substrate, and includes, from the substrate, an n−2-th layer made of a high refractive index material, an n−1-th layer made of an amorphous material containing AlF, and an n-th layer made of a low refractive index material, each of the high and low refractive index materials containing a crystalline material.


Find Patent Forward Citations

Kuwabara, Seiji. (2009). Optical element having antireflection film, and exposure apparatus (U.S. Patent No. 7492510). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7492510

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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