The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2009
Filed:
Sep. 09, 2004
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Noud Jan Gilissen, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Noud Jan Gilissen, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate or a patterning device used in a lithographic apparatus and a lithographic device manufacturing method are presented. The substrate and patterning device are aligned with respect to a patterning beam and are movably supported by a support. Resonances in said support, however, may render the manufactured device unusable and/ or may render the control system complex. Therefore an actuator assembly frame with flexible coupling devices coupled to the support is provided with a number of actuators configured to move the support in a number of degrees of freedom. Thus, the resonances are damped by the flexible coupling devices resulting in a larger bandwidth for the control system and thus enabling a better position accuracy of the support.