The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2009
Filed:
Jun. 22, 2005
Masayuki Shiraishi, Kumagaya, JP;
Masayuki Shiraishi, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An Sn—Ga type alloy having a composition in which the atomic % of Sn is 15% or less is accommodated inside a heated tankThe Sn alloy pressurized by the pressurizing pump is conducted to a nozzleso that a liquid-form Sn alloy is caused to jet from the tip end of this nozzledisposed inside a vacuum chamberThe liquid-form Sn alloy that is caused to jet from the nozzlehas a spherical shape as a result of surface tension, and forms a targetLaser light generated by an Nd:YAG laser light sourcedisposed on the outside of the vacuum chamberis focused by a lensand introduced into the vacuum chamberThe targetthat is irradiated by the laser is converted into a plasma, and radiates light that includes EUV light.