The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2009
Filed:
Nov. 10, 2006
Yao-nan Lin, Miao-Li, TW;
Yao-Nan Lin, Miao-Li, TW;
Innolux Display Corp., Miao-Li County, TW;
Abstract
An exemplary method for fabricating a thin film transistor array substrate () includes: providing an insulating substrate (); coating a transparent conductive layer () and a gate metal layer () on the substrate; forming a gate electrode () and a pixel electrode () using a first photo-mask process; forming a gate insulating layer (), an amorphous silicon layer (), a doped amorphous silicon layer (), and a source/drain metal layer () on the substrate; forming a plurality of source electrodes () and a plurality of drain electrodes () using a second photo-mask process; depositing a metal layer () on the substrate and the pixel electrodes; and forming a passivation layer () on the source electrodes, the drain electrodes and the channels and a plurality of metal contact layers () using a third photo-mask process.