The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2009

Filed:

Dec. 20, 2004
Applicants:

Shivkumar Chiruvolu, San Jose, CA (US);

Michael Edward Chapin, Sunnyvale, CA (US);

Inventors:

Shivkumar Chiruvolu, San Jose, CA (US);

Michael Edward Chapin, Sunnyvale, CA (US);

Assignee:

NanoGram Corporation, Miltipas, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/48 (2006.01); C23C 16/448 (2006.01); C23C 16/06 (2006.01); C23C 16/22 (2006.01); C23C 16/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

Methods for forming coated substrates can be based on depositing material from a flow onto a substrate in which the coating material is formed by a reaction within the flow. In some embodiments, the product materials are formed in a reaction driven by photon energy absorbed from a radiation beam. In additional or alternative embodiments, the flow with the product stream is directed at the substrate. The substrate may be moved relative to the flow. Coating materials can be formed with densities of 65 percent to 95 percent of the fully densified coating material with a very high level of coating uniformity.


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