The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2009

Filed:

Jan. 21, 2004
Applicants:

Cherie R Kagan, Ossining, NY (US);

Tricia Breen Carmichael, Hopewell Junction, NY (US);

Laura Louise Kosbar, Mohegan Lake, NY (US);

Inventors:

Cherie R Kagan, Ossining, NY (US);

Tricia Breen Carmichael, Hopewell Junction, NY (US);

Laura Louise Kosbar, Mohegan Lake, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C 1/16 (2006.01); B05D 5/12 (2006.01); C03C 25/16 (2006.01); H01L 21/208 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a method of forming a patterned thin film on a surface of a substrate having thereon a patterned underlayer of a self-assembled monolayer. The method comprises depositing a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate. The present invention further provides processes for preparing the self-assembled monolayer. The present invention still further provides solution-based deposition processes, such as spin-coating and immersion-coating, to deposit a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate.


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