The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2009
Filed:
Aug. 24, 2006
Nestor P. Murphy, Oxford, MI (US);
David E. Rock, Sylvania, OH (US);
Nestor P. Murphy, Oxford, MI (US);
David E. Rock, Sylvania, OH (US);
Guardian Industries Corp., Auburn Hills, MI (US);
Abstract
An ion source is provided which is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, a magnet yoke assembly used in the ion source is provided, and the magnet yoke assembly includes a lower yoke and an upper yoke. At least one magnet is disposed between the lower yoke and the upper yoke, with the at least one magnet having a substantially rectangular shape in certain example embodiments. The at least one magnet may be adhered to the lower yoke and/or the upper yoke.