The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2009
Filed:
Jul. 26, 2005
Ho Seok Choi, Suwon-si, KR;
Vasily Lenyashine, Suwon-Si, KR;
Hyeong Min Ahn, Yongin-Si, KR;
Jeong Su Ha, Suwon-Si, KR;
Sergey Antonov, Suwon-Si, KR;
MI Jeong Song, Suwon-Si, KR;
Ho Seok Choi, Suwon-si, KR;
Vasily Lenyashine, Suwon-Si, KR;
Hyeong Min Ahn, Yongin-Si, KR;
Jeong Su Ha, Suwon-Si, KR;
Sergey Antonov, Suwon-Si, KR;
Mi Jeong Song, Suwon-Si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A TFT array inspecting apparatus inspects a TFT array disposed at either an inclined position and a level position. The TFT array inspecting apparatus includes a vacuum chamber, a stage disposed in the vacuum chamber so that a TFT array to be inspected is disposed on the stage, an electron gun disposed opposite to the stage in the vacuum chamber to generate an electron beam onto the TFT array, an electron detecting unit to detect secondary electrons emitted from the TFT array by the electron gun, and at least one elevating unit to move the TFT array move between a level position and an inclined position having a designated angle with the level position.