The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2009
Filed:
Dec. 10, 2002
Giacomo Nicolao Maccalli, Novate Milanese, IT;
Olle Kordina, Oldsmar, FL (US);
Gianluca Valente, Milan, IT;
Danilo Crippa, Novara, IT;
Franco Preti, Milan, IT;
Giacomo Nicolao Maccalli, Novate Milanese, IT;
Olle Kordina, Oldsmar, FL (US);
Gianluca Valente, Milan, IT;
Danilo Crippa, Novara, IT;
Franco Preti, Milan, IT;
E.T.C. Epitaxial Technology Center SRL, Catania, IT;
Abstract
The present invention relates to a susceptor system for an apparatus for the treatment of substrates and/or wafers, provided with a treatment chamber () delimited by at least two walls and with at least one heating solenoid (); the susceptor system comprises at least one susceptor element () delimited by an outer surface and made of electrically conducting material suitable for being heated by electromagnetic induction; the susceptor element () is hollow; a first portion of the outer surface of the susceptor element () is suitable for acting as a wall of the treatment chamber (); a second portion of the outer surface of the susceptor element () is suitable for being disposed close to the heating solenoid ().