The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2009
Filed:
Oct. 30, 2007
John N. Gregg, Marble Falls, TX (US);
Scott L. Battle, Cedar Park, TX (US);
Jeffrey I. Banton, Burnet, TX (US);
Donn K. Naito, Marble Falls, TX (US);
Ravi K. Laxman, San Jose, CA (US);
John N. Gregg, Marble Falls, TX (US);
Scott L. Battle, Cedar Park, TX (US);
Jeffrey I. Banton, Burnet, TX (US);
Donn K. Naito, Marble Falls, TX (US);
Ravi K. Laxman, San Jose, CA (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Abstract
Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may include an amoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resuting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment.