The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Jul. 27, 2006
Applicant:
Maki Hamaguchi, Kobe, JP;
Inventor:
Maki Hamaguchi, Kobe, JP;
Assignee:
Kobe Steel, Ltd, Kobe-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); B31D 3/00 (2006.01); C01B 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed herein is an inner tube of glass-like carbon for CVD apparatus and a process for production thereof. The inner tube has its surface roughened without increase in metal impurities which cause particles. It has improved adhesion to CVD deposit film and also has a high degree of roundness. The surface roughness (on both the inner and outer surfaces) is 0.1-10 μm measured according to JIS B0601. The concentration of metal impurities (iron, copper, chromium, sodium, potassium, calcium, magnesium, and aluminum) in the surface is less than 50×10atoms/cm.