The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Jan. 06, 2006
Shigeo Tamaki, Asahi, JP;
Kosuke Umeda, Asahi, JP;
Shigeo Tamaki, Asahi, JP;
Kosuke Umeda, Asahi, JP;
Kuroda Pneumatics Limited, Kanagawa, JP;
Abstract
The present invention relates to a switching valve device used for vacuum suction of a member such as a semiconductor chip, and the object thereof is to break a vacuum rapidly and smoothly. The switching valve device includes a vacuum suction switching valve function for vacuum suction, a vacuum break switching valve function for vacuum break, and an open-to-atmosphere switching valve function which in conjunction with an operation of the vacuum suction switching valve function, opens a passage to the atmosphere side when the vacuum suction switching valve function is off and closes the passage to the atmosphere side when the vacuum suction switching valve function is on. The vacuum suction switching valve function, the vacuum break switching valve function, and the open-to-atmosphere switching valve function are integrally incorporated into a body portion.