The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Oct. 30, 2003
Paul C. Allen, Beaverton, OR (US);
Alan J. Wickstrom, Beaverton, OR (US);
Bryan C. Bolt, Beaverton, OR (US);
Paul C. Allen, Beaverton, OR (US);
Alan J. Wickstrom, Beaverton, OR (US);
Bryan C. Bolt, Beaverton, OR (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A multiple beam generator for use in a scanning system, wherein the generator includes an acousto-optic deflector (AOD) which during use receives a laser beam and generates a deflected beam, the deflection of which is determined by an AOD control signal; a diffractive element which generates an array of input beams from the deflected beam; and a control circuit which during operation generates the AOD control signal and varies a characteristic of the first control signal to account for errors in the scanning system.