The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Aug. 25, 2005
Applicant:
Yuichi Shimizu, Hokuto, JP;
Inventor:
Yuichi Shimizu, Hokuto, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/1337 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing an electro-optical device including a pair of substrates with an electro-optical material interposed therebetween includes forming an alignment film made of an inorganic material on a substrate surface of at least one of the substrates opposite to the electro-optical material by fixing an angle between the substrate surface and a scattering direction of the inorganic material to a predetermined value and performing a PVD method, in a processing chamber; and, after the PVD method starts, introducing at least one kind of repair gas for repairing defects of the alignment film into the processing chamber.