The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
May. 19, 2006
Gota Niimi, Shimizu, JP;
Gota Niimi, Shimizu, JP;
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
An electrode unit of an extreme ultraviolet radiation generator comprise a breakdown voltage impression electrode, a ground electrode, an insulator provided in contact with the breakdown voltage impression electrode and the ground electrode in which plasma is generated between the discharge electrodes thereby emitting extreme ultraviolet radiation from the generated plasma, wherein at least one of the breakdown voltage impression electrode and the ground electrode includes a cooling portion which is made of copper, aluminum, or a material which contains copper, aluminum, or combination thereof as a main component and in which a passage through which a coolant passes is formed, and a discharge portion which is provided in close contact with a surface of the cooling portion, and which is made of any one of tungsten, tantalum, rhenium, molybdenum, and an alloy thereof as the a main component.