The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Nov. 12, 2004
Wyatt O. Davis, Bothell, WA (US);
Dean R. Brown, Lynnwood, WA (US);
Thomas W. Montague, Mercer Island, WA (US);
Randall B. Sprague, Carnation, WA (US);
Wyatt O. Davis, Bothell, WA (US);
Dean R. Brown, Lynnwood, WA (US);
Thomas W. Montague, Mercer Island, WA (US);
Randall B. Sprague, Carnation, WA (US);
Microvision, Inc., Redmond, WA (US);
Abstract
A high performance MEMS scanner is disclosed. In some embodiments, scanner mirror has a wide and short aspect ratio that is similar to rotating polygon facets. Long torsion arms allow large rotation angles including 20° zero-to-peak mechanical and greater. Suspensions couple the scan mirror to torsion arms, reducing dynamic mirror deformation by spreading the torque load. 'leverage members' at the distal ends of the torsion arms help reduce stress concentrations. Elimination of a mounting frame increases device yield. Heater leads allow for precise trimming of the scanner resonant frequency. A compressive mount holds mounting pads against mounting structures.