The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2009

Filed:

Jan. 28, 2008
Applicants:

Gyu Seog Cho, Kyoungki-do, KR;

Yong Taik Kim, Seoul, KR;

Inventors:

Gyu Seog Cho, Kyoungki-do, KR;

Yong Taik Kim, Seoul, KR;

Assignee:

Hynix Semiconductor Inc., Kyoungki-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/335 (2006.01);
U.S. Cl.
CPC ...
Abstract

The recess channel transistor includes: a semiconductor substrate including a device insulation layer defining an activation region in which recesses are formed; insulation buffer patterns, each of which is formed at an opening of the recess on a surface of the substrate; gates, each of which includes a recess gate formed in the recess and a top gate formed on the substrate; spacers, each of which is formed at both sides of the gate; and a source region and a drain region formed at both sides of each gate on the surface of the substrate, where the source and drain regions have an even doping profile due to the existence of insulation buffer patterns. Accordingly, characteristics of the transistor can be prevented from deteriorating due to misalignment of the top gate with the recess gate.


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