The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Jan. 11, 2006
Masami Urano, Kanagawa, JP;
Hiromu Ishii, Kanagawa, JP;
Toshishige Shimamura, Kanagawa, JP;
Yasuyuki Tanabe, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Tomomi Sakata, Saitama, JP;
Masami Urano, Kanagawa, JP;
Hiromu Ishii, Kanagawa, JP;
Toshishige Shimamura, Kanagawa, JP;
Yasuyuki Tanabe, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Tomomi Sakata, Saitama, JP;
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Abstract
In a semiconductor device having a MEMS according to this invention, a plurality of units having movable portions for constituting a MEMS are monolithically mounted on a semiconductor substrate on which an integrated circuit including a driving circuit, sensor circuit, memory, and processor is formed. Each unit has a processor, memory, driving circuit, and sensor circuit.