The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Sep. 30, 2005
Applicants:
Eun Sok Kim, Rancho Palos Verdes, CA (US);
Qiang Zou, Alhambra, CA (US);
Inventors:
Eun Sok Kim, Rancho Palos Verdes, CA (US);
Qiang Zou, Alhambra, CA (US);
Assignee:
University of Southern California, Los Angeles, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/12 (2006.01); G01P 9/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane.