The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2009
Filed:
Jul. 14, 2004
Dirk Schiller, Hürth, DE;
Holger Dietz, Köln, DE;
Gerhard Wilhelm Walter, Kerpen-Neubottenbroich, DE;
Dirk Schiller, Hürth, DE;
Holger Dietz, Köln, DE;
Gerhard Wilhelm Walter, Kerpen-Neubottenbroich, DE;
Oerlikon Leybold Vacuum GmbH, Cologne, DE;
Abstract
A vacuum device comprises a plurality of cryopumps () connected with one or a plurality of vacuum chambers. The cryopumps () are connected via media supply conduits () and media return conduits () with a compressor (). An adjusting device () is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps () comprise a temperature measuring device. The temperature measuring device and the adjusting device () are connected with a controller (). To allow the desired amount of media to be fed to the cryopumps (), the adjusting device () comprises a throttle () in a media supply conduit () and a controllable valve in a throttle bypass conduit ().