The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Aug. 18, 2006
Applicants:
Stefan Falk-jordan, Karlsruhe, DE;
Bernd Nawracala, Karlsruhe, DE;
Hans-peter Zimmermann, Waldbronn, DE;
Inventors:
Stefan Falk-Jordan, Karlsruhe, DE;
Bernd Nawracala, Karlsruhe, DE;
Hans-Peter Zimmermann, Waldbronn, DE;
Assignee:
Agilent Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/26 (2006.01); G01C 1/00 (2006.01); G01N 21/86 (2006.01); G01N 33/53 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of determining position information, the method having detecting—along a first direction—a value of a geometry parameter related to a structure formed on and/or in a substrate, and determining—with regard to a second direction—a value of a position parameter based on the detected value of the geometry parameter and a predetermined relationship between the geometry parameter and the position parameter.