The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2009
Filed:
Jan. 27, 2006
Michael Alan Gevelber, Auburndale, MA (US);
Adam Scott Brewster, Brighton, MA (US);
Brian Louis Vattiat, Brookline, MA (US);
Michael Alan Gevelber, Auburndale, MA (US);
Adam Scott Brewster, Brighton, MA (US);
Brian Louis Vattiat, Brookline, MA (US);
Trustees of Boston University, Boston, MA (US);
Cyber Materials LLC, Auburndale, MA (US);
Abstract
A method of characterizing an electron beam is described, comprising providing a system including an electron gun having a steering coil. A material having a surface is also provided. An electron beam from said electron gun is directed to said surface. The directing includes providing a first current to the steering coil to direct the electron beam to a first point on the surface and then providing a second current to the steering coil to direct the electron beam to a second point on the surface. An imaging system is mounted for viewing said surface. An image is collected based on light emitted from the surface because of the electron beam directed at the first point and the second point. A light intensity is determined at the first point and at the second point.