The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
May. 24, 2006
Martin M. Liphardt, Lincoln, NE (US);
James D. Welch, Omaha, NE (US);
Corey L. Bungay, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
James D. Welch, Omaha, NE (US);
Corey L. Bungay, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
J.A. Woollam Co., Inc., Lincoln, NE (US);
Abstract
A system and method of preventing substrate backside reflected components in a beam of electromagnetic radiation caused to reflect from the surface of a sample in an ellipsometer or polarimeter system, involving placing a mask adjacent to the surface of the sample which allows electromagnetic radiation to access the sample over only a limited area, wherein the mask can include detector elements for collecting electromagnetic radiation reflected from the sample backside.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile