The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Mar. 20, 2007
Kazuhiro Miyakawa, Itabashi-ku, JP;
Yoichiro Iwa, Itabashi-ku, JP;
Kazuhiro Miyakawa, Itabashi-ku, JP;
Yoichiro Iwa, Itabashi-ku, JP;
Kabushiki Kaisha TOPCON, Tokyo-to, JP;
Abstract
A surface inspection method for projecting a laser beam to an inspection surface and for scanning and detecting foreign objects or the like on the inspection surface, comprising a step of being had a required number of detecting regions by a photodetector against a projecting site of the laser beam, a step of receiving a detection light at the photodetector so that a detection light intensity is varied between the detecting regions, a step of acquiring a required number of output signals with different detection light intensities on an inspection site, and a step of selecting an output signal which is an unsaturated output signal and has the highest value among the required number of output signals as a surface detection signal.