The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Feb. 28, 2005
Keiichi Mori, Tokyo, JP;
Yoshichika Kato, Tachikawa, JP;
Satoshi Yoshida, Tama, JP;
Kenji Kondou, Chofu, JP;
Yoshihiko Hamada, Akiruno, JP;
Osamu Imaki, Hachioji, JP;
Keiichi Mori, Tokyo, JP;
Yoshichika Kato, Tachikawa, JP;
Satoshi Yoshida, Tama, JP;
Kenji Kondou, Chofu, JP;
Yoshihiko Hamada, Akiruno, JP;
Osamu Imaki, Hachioji, JP;
Japan Aviation Electronics Industry Limited, Tokyo, JP;
Abstract
In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable roda movable comb electrodeetc.) displaceable in parallel to the substrate surface and stationary parts (a stationary partetc.), the stationary parts are fixedly secured to the single-crystal silicon substratewith an insulating layersandwiched therebetween, and depressionsare formed in those surface regions of the single-crystal silicon substratewhere no stationary parts are present, and the movable parts are positioned above the depressionsThe depressionsform gapslarge enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.