The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Apr. 14, 2003
Masafumi Kokura, Kashiba, JP;
Yoshiharu Kataoka, Osaka, JP;
Masafumi Kokura, Kashiba, JP;
Yoshiharu Kataoka, Osaka, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
The substrate () of the present invention includes: a first electrode () and a second electrode (). The second electrode () is formed on an insulation film () covering at least a part of the first electrode () and electrically connected with the first electrode () through a contact hole () formed in the insulation film (). The first electrode () includes a laminated structure of a metal film () and a protective film (). An etching rate of the metal film () is almost equal to an etching rate of the protective film () with respect to a first etching for forming the metal film () and the protective film (). An etching rate of the protective film () is almost zero with respect to a second etching for forming the contact hole ().