Method of making microminiature moving device

Abstract

In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod, a movable comb electrode, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part, etc.), the stationary parts are fixedly secured to the single-crystal silicon substratewith an insulating layersandwiched therebetween, and depressionsare formed in those surface regions of the single-crystal silicon substratewhere no stationary parts are present, and the movable parts are positioned above the depressions. The depressionsform gapslarge enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.