The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
May. 23, 2006
Masami Murai, Nagano-ken, JP;
Masami Murai, Nagano-ken, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
The present invention provides a piezoelectric thin film element with superior piezoelectric properties in which the condition of the crystal of the piezoelectric thin film is appropriately controlled, and a manufacturing method thereof, as well as a inkjet recording head, inkjet printer, or other liquid ejecting apparatus employing the same. The piezoelectric thin film elementcomprises a top electrode, a bottom electrode, and a piezoelectric thin filmformed between the top electrodeand the bottom electrode, wherein the piezoelectric thin filmis structured so as to comprise a first layerlocated nearest to the bottom electrode and second layers (-) that are located nearer to the top electrode than the first layer and that each have a thickness greater than that of the first layer