The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Apr. 05, 2006
Applicant:
Matthias Brunner, Kirchheim-Heimstetten, DE;
Inventor:
Matthias Brunner, Kirchheim-Heimstetten, DE;
Assignee:
Applied Materials, GmbH, Ismaning, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/305 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to methods for positioning of a substrate and contacting of the test object for testing with a test apparatus with an optical axis and corresponding devices. Thereby, the substrate is put on the holder. The substrate is positioned relative to the optical axis. A contact unit is also positioned relative to the optical axis, whereby the contact unit is positioned independent of the positioning activity of the substrate. Thereby, a flexible contacting of test objects on the substrate can be realized.