The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2009

Filed:

May. 02, 2005
Applicants:

Dirk Manger, Dresden, DE;

Stefan Slesazeck, Dresden, DE;

Stefan Tegen, Dresden, DE;

Klaus Muemmler, Dresden, DE;

Alexander Sieck, Dresden, DE;

Inventors:

Dirk Manger, Dresden, DE;

Stefan Slesazeck, Dresden, DE;

Stefan Tegen, Dresden, DE;

Klaus Muemmler, Dresden, DE;

Alexander Sieck, Dresden, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 29/94 (2006.01);
U.S. Cl.
CPC ...
Abstract

A memory cell array includes a plurality of active areas in which a plurality of memory cells are formed. A memory cell includes a storage capacitor, a transistor at least partially formed in a semiconductor substrate with a substrate surface, the transistor including a first source/drain region. A second source/drain region being formed adjacent to the substrate surface, a channel region connecting the first and second source/drain regions. The first source/drain region is formed adjacent to the substrate surface. The channel region is disposed in the semiconductor substrate, and a gate electrode. Rows of the active areas are separated from each other by isolation grooves that extend along a first direction. A first and a second word lines are disposed on either lateral sides of each of the rows of active areas. The first and the second word lines are connected with each other via the gate electrodes of the transistors of the corresponding row of active areas.


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