The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Mar. 22, 2005
Yoshiaki Kojima, Tsurugashima, JP;
Yoshiaki Kojima, Tsurugashima, JP;
Pioneer Corporation, Tokyo, JP;
Abstract
An apparatus includes a beam deflection portion for deflecting the electron beam to change an irradiation position of the electron beam; a synchronization signal generation portion for generating a synchronization signal which is in synchronization with the rotation of the substrate; a controller for controlling the beam deflection portion on the basis of the synchronization signal in order to deflect the electron beam in a rotational radial direction of the substrate and in a rotational tangential direction of the substrate opposite to a rotational direction of the substrate, while drawing transition is performed from one circle to another circle; and a beam cutoff portion for cutting off the irradiation of the electron beam on the substrate, for a period during the electron beam is deflected in the rotational radial direction.