The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2009
Filed:
Apr. 16, 2004
Allen L. D'ambra, Burlinggame, CA (US);
Arulkumar Shanmugasundram, Sunnyvale, CA (US);
Michael X. Yang, Palo Alto, CA (US);
Yevgeniy (Eugene) Rabinovich, Fremont, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Allen L. D'Ambra, Burlinggame, CA (US);
Arulkumar Shanmugasundram, Sunnyvale, CA (US);
Michael X. Yang, Palo Alto, CA (US);
Yevgeniy (Eugene) Rabinovich, Fremont, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the invention generally provide a fluid delivery system for an electrochemical plating platform. The fluid delivery system is configured to supply multiple chemistries to multiple plating cells with minimal bubble formation in the fluid delivery system. The system includes a solution mixing system, a fluid distribution manifold in communication with the solution mixing system, a plurality of fluid conduits in fluid communication with the fluid distribution manifold, and a plurality of fluid tanks, each of the plurality of fluid tanks being in fluid communication with at least one of the plurality of fluid conduits.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile