The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2008
Filed:
Apr. 29, 2005
Applicant:
Shoko Ito, Kanagawa, JP;
Inventor:
Shoko Ito, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/223 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor substrate is exposed to an acid vapor, an impurity on the surface of the semiconductor substrate exposed to the acid vapor is scanned and collected with an acid solution, the acid solution after being subjected to the scanning and collecting is changed to a concentrated and dried object on a substrate having a mirror surface, the concentrated and dried object is changed to a particle-like concentrated object using an acid, and the particle-like concentrated object is analyzed using a total reflection X-ray fluorescence analysis device.