The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7470602 B1

PDF
Full Text
Expired
Date of Patent:
Dec. 30, 2008

Filed:

Apr. 04, 2005
Applicants:

Toshio Kudo, Tokyo, JP;

Kouji Seike, Yokosuka, JP;

Kazunori Yamazaki, Zushi, JP;

Inventors:

Toshio Kudo, Tokyo, JP;

Kouji Seike, Yokosuka, JP;

Kazunori Yamazaki, Zushi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/36 (2006.01);
U.S. Cl.
CPC ...
Abstract

A workpiece object is prepared which has a thin film on the surface and made of amorphous material. A pulse laser beam is applied to the thin film, the pulse laser beam having an elongated beam cross section along one direction on the surface of the thin film. With this pulse laser beam, the thin film is melted and thereafter the thin film is solidified to form crystal grains framing chains along a long axis direction of a beam incidence region in first stripe regions. The first stripe regions extend along the long axis direction in regions of the beam incidence region between its center line and borders of the beam incidence region extending along the long axis direction, and are spaced apart from the borders and the center line by a predetermined distance.


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