Production method of polycrystalline ceramic body

Abstract

To provide a production method of a polycrystalline ceramic body with excellent density, a preparation step, a mixing step, a forming step and a heat-treating step are performed. In the preparation step, a coarse particle ceramic powder, and a fine particle powder having an average particle diameter of ⅓ or less of the average particle diameter of the coarse particle ceramic powder are prepared. In the mixing step, the coarse particle ceramic powder and the fine particle powder are mixed to produce a raw material mixture. In the forming step, the raw material mixture is formed to a shaped body. In the heat-treating step, the shaped body is heated and thereby sintered to produce a polycrystalline ceramic body. In the heat-treating step, a temperature elevating process and a first holding process are performed and at the same time, a second holding process and/or a cooling process are performed. In the temperature elevating process, heating is started to elevate the temperature and in the first holding process, the shaped body is held at a temperature T° C. In the second holding process, the shaped body is held at a temperature T° C. lower than the temperature T° C. In the cooling process, the shaped body is cooled at a temperature dropping rate of 60° C./h or less from the temperature T° C.