The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2008
Filed:
Nov. 30, 2007
Applicant:
Mitsuo Nishimura, Kawasaki, JP;
Inventor:
Mitsuo Nishimura, Kawasaki, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/62 (2006.01); G03B 27/58 (2006.01); H02K 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exposure apparatus which can change a reticle efficiently with a simple arrangement is provided. When changing the reticle, a table is moved to a predetermined change operation position. At this time, a second magnet is retreated to a position where a repulsion force generated by a first magnet and the second magnet does not act on the table. After the reticle is changed, the second magnet is restored to a position where a repulsion force generating unit exerts a repulsion force upon the table.