The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2008
Filed:
May. 11, 2006
Nancy A. Greco, Lagrangeville, NY (US);
Kimberly F. Hooper, Fishkill, NY (US);
Kevin S. Petrarca, Newburgh, NY (US);
Nancy A. Greco, Lagrangeville, NY (US);
Kimberly F. Hooper, Fishkill, NY (US);
Kevin S. Petrarca, Newburgh, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method and apparatus for cleaning a wafer with a metal exposed through an insulator, through the use of a wet cleaning tank in concert with a feedback system on the potential difference between two leads of the wet cleaning tank. The cleaning tank has a bath in which the wafer and the two leads are immersed. The potential difference between the two leads is regulated when the feedback system detects a change in the potential across the two leads.