The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2008
Filed:
Mar. 28, 2005
Applicants:
Robert B. Ford, West Reading, PA (US);
Christopher A. Michaluk, Gilbertsville, PA (US);
Inventors:
Robert B. Ford, West Reading, PA (US);
Christopher A. Michaluk, Gilbertsville, PA (US);
Assignee:
Cabot Corporation, Boston, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C22F 1/18 (2006.01); C22F 1/08 (2006.01); C23C 14/34 (2006.01); C23C 14/00 (2006.01); C25B 9/00 (2006.01); C25B 11/00 (2006.01); C21D 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Sputtering targets and methods of making sputtering targets are described. The method includes the steps of: providing a sputtering metal workpiece made of a valve metal; transverse cold-rolling the sputtering metal workpiece to obtain a rolled workpiece; and cold-working the rolled workpiece to obtain a shaped workpiece. The sputtering targets exhibits a substantially consistent grain structure and/or texture on at least the sidewalls.