The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2008
Filed:
Apr. 22, 2006
Stephen Gaalema, Portola Valley, CO (US);
Douglas Webb, Los Altos, CA (US);
Alexander Payne, Ben Lomond, CA (US);
Josef Berger, Los Altos, CA (US);
Stephen Gaalema, Portola Valley, CO (US);
Douglas Webb, Los Altos, CA (US);
Alexander Payne, Ben Lomond, CA (US);
Josef Berger, Los Altos, CA (US);
Silicon Light Machines Corporation, San Jose, CA (US);
Abstract
A driver is provided for use with a MEMS device. Generally, the driver includes: (i) a high voltage circuit electrically coupled to a movable actuator of the MEMS to apply a HV pulse thereto; and (ii) a charge control circuit coupled to a base electrode formed in a substrate underlying the actuator to control a potential applied to the base electrode. The charge control circuit can include a capacitance divider having a plate capacitor defined by the actuator and the base electrode, and a charge storage capacitor electrically coupled to the base electrode and in series with the plate capacitor. The charge storage capacitor can include a variable, voltage controlled capacitor, the capacitance of which is controlled by an input signal or voltage to the driver. Other embodiments are also disclosed.