The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2008
Filed:
Jun. 30, 2005
Ryoichi Ohara, Kawasaki, JP;
Naoko Yanase, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Kenya Sano, Kawasaki, JP;
Takaaki Yasumoto, Kawasaki, JP;
Kazuhide Abe, Kawasaki, JP;
Toshihiko Nagano, Kawasaki, JP;
Michihiko Nishigaki, Kawasaki, JP;
Takashi Kawakubo, Yokohama, JP;
Ryoichi Ohara, Kawasaki, JP;
Naoko Yanase, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Kenya Sano, Kawasaki, JP;
Takaaki Yasumoto, Kawasaki, JP;
Kazuhide Abe, Kawasaki, JP;
Toshihiko Nagano, Kawasaki, JP;
Michihiko Nishigaki, Kawasaki, JP;
Takashi Kawakubo, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity; a piezoelectric layer provided on the bottom electrode; and a top electrode provided on the piezoelectric layer having crystal axes oriented along a thickness direction of the piezoelectric layer, a full width at half maximum of the distribution of the orientations of the crystal axes is smaller than or equal to about six degrees.