The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2008

Filed:

Nov. 16, 2005
Applicants:

Bahadir Tunaboylu, Gilbert, AZ (US);

Edward L. Malantonio, Conshohocken, PA (US);

Inventors:

Bahadir Tunaboylu, Gilbert, AZ (US);

Edward L. Malantonio, Conshohocken, PA (US);

Assignee:

SV Probe Pte Ltd., Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/38 (2006.01); B23H 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method is provided for shaping tips of lithographically-produced probe elements configured for use in a probe card to establish electrical communication with a contact of a semiconductor device to be tested. The method includes (a) lithographically producing a plurality of probe elements and (b) using a subtractive process, such as laser ablation or micro-electro-discharge machining, to remove material from each tip of the plurality of probe elements to form each tip into a shape well adapted to penetrate a contaminant oxide layer.


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