The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2008
Filed:
May. 01, 2006
Applicants:
Roderick A. B. Devine, Albuquerque, NM (US);
Harold L. Hughes, West River, MD (US);
Akos G. Revesz, Bethesda, MD (US);
Inventors:
Roderick A. B. Devine, Albuquerque, NM (US);
Harold L. Hughes, West River, MD (US);
Akos G. Revesz, Bethesda, MD (US);
Assignee:
The United States of America as represented by the Secretary of the Air Force, Washington, DC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
In microelectronic circuits involving dielectric/semiconductor interfaces having interstitial sites in the dielectric, a method for hardening these interfaces by introducing a small atomic diameter inert gas into the interstitial sites.