The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2008

Filed:

Oct. 30, 2006
Applicants:

Yoshihiro Mizuno, Kawasaki, JP;

Satoshi Ueda, Kawasaki, JP;

Osamu Tsuboi, Kawasaki, JP;

Ippei Sawaki, Kawasaki, JP;

Hisao Okuda, Kawasaki, JP;

Norinao Kouma, Kawasaki, JP;

Hiromitsu Soneda, Kawasaki, JP;

Fumio Yamagishi, Kawasaki, JP;

Inventors:

Yoshihiro Mizuno, Kawasaki, JP;

Satoshi Ueda, Kawasaki, JP;

Osamu Tsuboi, Kawasaki, JP;

Ippei Sawaki, Kawasaki, JP;

Hisao Okuda, Kawasaki, JP;

Norinao Kouma, Kawasaki, JP;

Hiromitsu Soneda, Kawasaki, JP;

Fumio Yamagishi, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.


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